ABSTRACT

Analysis carried out in this chapter shows that mesoporous-macroporous and hierarchical metal-oxide structures have great advantages for application in humidity sensors. It was established that the ability to create macroporous objects from nanoscaled components may create new resources for optimization of humidity-sensor parameters. In particular, the presence of mesopores guarantees high sensitivity, and the presence of macropores facilitates fast response and recovery during the detection process. It is important to note that humidity sensors based on mesoporous-macroporous and hierarchical metal-oxide structures demonstrate required stability of characteristics.