ABSTRACT

Specification and typical parameters of electronic humidity sensors are discussed in the chapter. The list of companies operating in the market for humidity sensors is presented. Characterization, advantages, and disadvantages of Al2O3-based sensors, capacitive and resistive-humidity sensors, advanced resistive (piezoresistive) humidity sensors, thermal conductivity-based humidity sensors, quartz-crystal-microbalance-based humidity sensors, SAW-based dew-point hygrometers, and wireless humidity sensors are presented in the chapter. Conventional hygrometers presented on the market are also considered. Typical and recommended fields of applications for humidity sensors and hygrometers are discussed.