ABSTRACT
Semiconductors are main active materials that are used in microelectronics and optoelectronics. However, it was found that these materials can also be the basis for the development of humidity sensors. This chapter shows that such materials include Si, GaAs, GaN, BN, SiC, InP, chalcogenides (ZnS, ZnSe, CdS, and CdSe), and metal dichalcogenides (MoS2, MoSe2, WS2,and WSe2). As a result of research, it was found that these humidity sensors can have high sensitivity and fast response (ZnS, CdS, 2D MoS2,and WS2), as well as the necessary stability of the characteristics (GaN, BN, SiC). However, the same studies have shown that there are many limitations that prevent from their appearance on the humidity-sensor market. This chapter is devoted to the consideration of the whole complex of these problems.
