ABSTRACT
Combinatorial chemistry is defined as high-speed R&D.1 The combinatorial chemistry and highthroughput experimentation have emerged during the last decade as a response to the challenges of materials development in these increasingly complex experimental spaces.2 Although its antecedents can be traced to the beginning of the 20th century, combinatorial experimentation really began to take off around 1990 in the pharmaceutical industry and 1995 in materials development.3-5 This resulted from a convergence of technologies in robotics, semiconductor processing, computer software, and analytical capabilities, and from the simple realization that such productivity was possible.6-9 The rapid growth of this technology brought the revolution in the field of materials science research. With this technique, we can synthesize a thin-film array with various chemical compositions on a wafer and then carry out the parallel characterization of the physical and chemical properties of the samples rapidly.10 This combinatorial method helps us to find suitable materials for each application and finally design and predict the structure or chemical composition with desired properties. In this chapter we focus on the application of combinatorial methods in non-volatile memory chips.
