ABSTRACT

Micromechatronic systems integrate actuators, sensors, power electronics, and ICs. Within a focus on high-performance micromechatronic systems, books [1-3] cover the general issues in the systems design. Important topics and issues are outlined and covered in this section. One of the major components of micromechatronic systems is a high-performance microelectromechanical motion device that (1) converts physical stimuli to electrical or mechanical signals and vice versa, and, (2) performs actuation and sensing. These motion devices are controlled by ICs. Electromagnetic and electromechanical features of microelectromechanical motion devices are basics of their operation, design, analysis, and fabrication. Correspondingly, motion devices and ICs are designed taking into account possible system architectures [1-3]. The baseline step-by-step procedure in the design of micromechatronic systems is

1. Define application and environmental requirements 2. Specify performance specifications

Sergey Edward Lyshevski Rochester Institute of Technology

3. Devise (synthesize) microelectromechanical motion devices (actuators and sensors) researching operating principles, topologies, configurations, geometry, electromagnetic systems, and so forth

4. Perform electromagnetic, mechanical, and sizing-dimension estimates 5. Define technologies, techniques, processes, and materials to fabricate electromechanical motion

devices 6. Design ICs to control electromechanical motion devices 7. Develop high-fidelity mathematical modelswith minimumlevel of simplifications and assumptions

to examine integrated electromagnetic-mechanical phenomena and effects 8. Perform coherent electromagnetic and mechanical analysis 9. Modify and refine the design optimizing performance

10. Design control laws to control motion devices and implement these controllers using ICs 11. Integrate micromechatronic system

One of the most challenging design problems is the system architecture synthesis, system integration, optimization, and hardware (actuators, sensors, power electronics, ICs, microcontrollers, and DSPs) selection. The design starts with a given set of requirements and specifications. High-level functional design is performed first in order to produce detailed design at the subsystem and component level. Using the advanced subsystems and components, the initial design is performed, and the closed-loop electromechanical system performance is tested against the requirements. At each level of the design hierarchy, the system performance in the behavioral domain is used to evaluate and refine the design. The design flow is illustrated in Figure 17.1.