ABSTRACT
Using state-of-the-art fabrication technologies, optical engineers have been able to realize microoptical devices in a large variety of materials (semiconductors, glass, plastics, etc.). These micro-or nanoscale elements offer optical fl exibility not possible with traditional, bulk optical components. Furthermore, the size of these devices allows multiple functionalities on the same substrate as well as easier integration with conventional electronics and control systems. A wide assortment of optical devices has been used for various applications such as diffractive or refractive microoptics, micromirrors, integrated waveguides, near-fi eld optics, and microprisms.3
