ABSTRACT
The tremendous progress in production techniques for microelectromechanical systems (MEMS) has caused the development of reliable MEMS products in many different application fields [1-7]. Therefore, the better performance of a MEMS product compared to its competitors is nowadays the crucial factor of a commercial success, whereas in the past, the pure ability to build the device was the target of development efforts. The assurance that the product is reliable and has high performance has top priority in the design and development process and, in addition, these requirements also have to be controlled during the manufacturing process.
