ABSTRACT
Prior to the description of the measurement techniques, the brief theoretical background in Section 3.2 correlates measured light scattering signals to microroughness. This particular case of light scattering mechanism was selected for demonstration because it is widely used and has proved applicable to a large number of surface inspection problems in practice. In Section 3.3, the main types of measurement arrangements, total scattering and angle resolved scattering, are described and examples of instruments are discussed in detail. The operation wavelengths of these techniques extend from visual to both the infrared (IR) and ultraviolet (UV) spectral regions. As light scattering in the deep ultraviolet (DUV) and vacuum ultraviolet (VUV) regions has currently become a critical issue, latest developments in 193 nm and 157 nm measurement techniques are also included. Section 3.4 summarizes essential standardization aspects for total and angle resolved light scattering measurements. In Section 3.5, examples of a variety of applications involving different types of
samples, wavelengths, measurement procedures, and data evaluation are given. How to advantageously combine light scattering techniques with profilometric methods is demonstrated in Section 3.6.
