ABSTRACT
Stylus Profiler .......................................................................................................................140 4.7 Optical Metrology Complementary to AFM .......................................................................142 4.8 Conclusions and Outlook .....................................................................................................142 References ......................................................................................................................................143
The atomic force microscope (AFM) is frequently used in measuring and otherwise characterizing surfaces in microsystem components, including microelectromechanical systems (MEMS) devices and magnetic recording read-write heads. The AFM is a tactile instrument that relies on direct physical contact of its mechanical microfabricated probe with the sample surface to make its measurements [1].
