ABSTRACT
The technique of surface profi le measurement using optical interference is widely used in industry as a noncontact and nondestructive method of quickly and accurately measuring the profi le of microscopic surfaces. However, its application to transparent thin fi lms has been limited because it is diffi cult to obtain an exact surface profi le measurement if the surface to be measured is covered with a transparent fi lm. This is because the interference beam coming from the back surface of the fi lm creates disturbance.
