![Preparation and Properties of SiO[sub(2)] Thin Films by the Sol-Gel Method Using Photoirradiation and Its Application to Surface Coating for Display](https://images.tandf.co.uk/common/jackets/crclarge/978042911/9780429119637.jpg "Preparation and Properties of SiO[sub(2)] Thin Films by the Sol-Gel Method Using Photoirradiation and Its Application to Surface Coating for Display")
ABSTRACT
I. Film Formation .....................................................................................422 II. Microhardness and HF Etch Rate.........................................................423
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