ABSTRACT
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A package serves to integrate all of the components required for a system applica-
tion in a manner that minimizes size, cost, mass, and complexity. It provides the
interface between the components and the overall system. The following subsec-
tions present the three main functions of the microelectromechanical systems
(MEMS) package: mechanical support, protection from the environment, and elec-
trical connection to other system components.
