ABSTRACT
MEMS devices invariably involve engineering of multiphysics designs to attain a design objective. The two physical domains most frequently utilized in MEMS devices are structural and electrical dynamics. Regardless of the design objective, a structure invariably needs to be designed to support, contain, or possibly deflect to perform a function. An electrical system is needed to sense the mechanical motion of the structure. At the microscale, damping due to viscous losses of the device to the surrounding atmosphere greatly influences the dynamics of the system.
