ABSTRACT
This chapter will present an overview of the various processes used in the fabrication of MEMS devices. The first section will present an introduction to materials and their structure. The processes that will be discussed in subsequent sections include deposition, patterning, and etching of materials as well as processes for annealing, polishing, and doping, which are used to achieve special mechanical, electrical, or optical properties. Many of the processes used for MEMS are adapted from the microelectronics industry; however, the conceptual roots for some of the fabrication processes (e.g., sputtering, damascene) significantly predate that industry.
