ABSTRACT
Just as MEMS fabrication has its roots in the microelectronics fabrication infrastructure, the MEMS design realization infrastructure has its roots in the microelectronics infrastructure as well. However, the MEMS design realization requirements are significantly different. MEMS design involves complex geometric, three-dimensional moving mechanical devices similar to macroworld machine design. The result is a MEMS design realization environment that leverages a significant portion from microelectronics while plotting a new path to meet the new demands.
