ABSTRACT
An important implication of the data obtained with both a tubular reactor and a bell jar reactor is that the polymer deposition onto a stationary substrate cannot be uniform due to the diffusional transport of polymer-forming species and the pathdependent growth mechanism. The variation of polymer deposition rates at various locations becomes smaller as the system pressure decreases because the diffusional displacement distance of gaseous species increases at lower pressure. It is important to recognize that a certain degree of thickness variation always exists when the plasma polymer is deposited onto a stationary substrate regardless of the type of reactor and the location of the substrate in the reactor.
