ABSTRACT
Metal-containing polymer films were prepared by simultaneous sputter deposition of electrode material (Cu or Ag) with plasma polymerization of methane by magnetron discharge. The maximal flux density, perpendicular component to the electric field, on the electrode surface was 208G. Methane was chosen as a monomer because its low molecular weight allows a higher energy input, which is favored for sputtering of the electrode surface. In addition, a methane plasma polymer provides unique waterinsensitive adhesion and excellent lap-shear strength [8,10,11].
