ABSTRACT
If the coating of the inner surface of a tubelike substrate or the interior surface, which is protected from the surface damage, is the main goal of LCVD coating, the use of basketlike tumbler reactor is a straightforward process. In other words, if the damages on the exterior surface are not a concern, the use of basketlike tumbler reactor is the most effective approach. Depending on the size and shape of substrate, the main surface could be protected by attaching a substrate to a shield that protects the surface from colliding with other surfaces. Such a protective cap or basket should have the minimal surface area because the total surface area placed in the basketlike tumbler influence the deposition rate on the substrate.
