ABSTRACT
The photon-emitting species are vitally important in luminous chemical vapor deposition (LCVD) process, and the location of the luminous gas phase indicates where actions occur within the interelectrode space. On the other hand, whether any particular photon-emitting species is primarily responsible for LCVD is a different issue. As is described in Chapter 5 for the growth and deposition mechanisms, many chemically reactive species, such as various forms of free radicals that do not emit photons, are major reactive species that carry the growth reactions. No single species could be identified as the precursor or chemically reactive species for the process.
