ABSTRACT
Because of the oscillation of electrons rather than linear motion, the influence of magnetic field imposed by the magnetrons also diminishes. Thus, the predominant role of the cathode observed in DC and AC discharge diminishes in 13.5-MHz discharge. The deposition rate characteristics (on electrode surface), i.e., the system pressure dependence and the refractive index of the deposit, are completely different from those for DC or 40-kHz discharge [1].
