ABSTRACT
The electron energy in Eq. (4.5) is much greater than that for Eq. (4.2), which causes the difference in the distance from the cathode surface where the cathode glow and negative glow appear.
The importance of the DG might give impression that those photon-emitting species are the precursor species in plasma polymerization. However, both the photon emission and the chemical reaction of reactive species (deposition of material or chemical modification of surface) are dissipation of excess energy (deactivation), which are exclusive of each other. In other words, if an excited species reacts chemically, it cannot emit photons, and conversely, if an excited species releases the excess energy by emitting photons, it cannot react chemically. If the photon-emitting species dissociates further by releasing the excess energy, its reaction product could react (polymerization).
