ABSTRACT
The glow is highly localized as the cathode glow, of which the volume fraction is very small, and monomer is fed into the DG mainly by monomer diffusion from the surrounding volume within a reactor. Because of this mechanism, the normalized deposition rate as well as the normalized energy input power are different from those in conventional glow discharges as described in Chapter 8. The observation of glow in the early stage of DC glow discharge provided an ideal situation to distinguish the DG and IG. It is reiterated that the DG is observed only with LCVD gases that form solid deposition, and molecular gases such as N2 and CO2 do not create the DG.
