ABSTRACT
Hydrocarbons that show a conspicuous increase of free radicals in LCVD upon the application of a pulsed radio frequency discharge can be categorized as compounds having a double or triple bond but not an aromatic structure. It is important to note that even with those monomers the deposition rates generally decrease with the pulsed discharge, although the reduction is not as great as one might expect on the basis of the duty cycle of the pulsed discharge.
