ABSTRACT
The internal stress of plasma polymers is dependent not only on the chemical nature of monomer but also on the conditions of plasma polymerization. In the plasma polymerizations of acetylene and acrylonitrile, apparent correlations are found between ss and the rate at which the plasma polymer is deposited on the substrate [2], as depicted in Figure 11.3. The effect of copolymerization of N2 and water with acetylene on the internal stress is shown in Figures 11.4 and 11.5. The copolymerization with a non-polymer-forming gas decreases the deposition rate. These figures merely indicate that the internal stress in plasma polymers prepared by radio frequency discharge varies with many factors. The apparent correlation to the parameter plotted could be misleading because these parameters do not necessarily represent the key operational parameter.
