ABSTRACT
In general plasma polymerization processes it has been established that the deposition rate and properties of a plasma polymer primarily depend on the value of the normalized energy input parameter W/FM, as described in Chapter 8. In LPCAT polymerization processes, as described in Chapter 16, the deposition rate of a plasma polymer primarily depends on the value of the normalized energy input parameter, which is given by W(FM)c/(FM)m. In this composite parameter, W is the power input applied to arc column, (FM)c is the mass flow rate of carrier gas (argon), and (FM)m is the mass flow rate of monomer that is injected into the cascade arc torch. The quantity of W(FM)c/(FM)m can be considered as the energy, which is transported by carrier gas plasma, applied to per mass unit of monomers.
