ABSTRACT
Since the deposition rate increases as a function of the same parameter (see Chapter 16), i.e., the normalized energy input parameter, the trend shown in Figure 11.3 might appear contradicting with the principle shown by Figure 11.11. However, the trend shown in Figure 11.3 is actually in accordance with the principle shown by Figure 11.11. In the operation for data shown in Figure 11.3, the deposition rate was increased by increasing monomer flow rate. The normalized energy input parameter for glow discharge polymerization (Figure 11.3) is W/FM, and the increase of F actually decreases the value of W/FM in the upper end of the transitional domain and also in the monomer-deficient domain of LCVD (see Chapter 8). Thus, the decrease of the internal stress with increasing deposition rate is correct correlation, but only within the boundary condition of the experiment for Figure 11.3. However, the correlation is not the general correlation because the parameter used is not the basic parameter of LCVD. This points out the importance of finding the basic governing principle of the process involved.
