ABSTRACT
The major difference between PVD and CVD is the change of the chemical nature of material in the vapor phase and in the solid state. PVD has no change of chemical nature of material used. For instance, gold vapor deposits as a solid-state gold in PVD. In contrast to this situation, the material deposits in CVD are different from the starting material with respect to the chemical composition and/or chemical structure. In other words, chemical reactions are crucially important factors of the material deposition. According to the definitions just described, there is no distinction among PP, PACVD, PECVD, PCVD, and CVD. Therefore, the further distinction of these terms must rely on the processing factors that are related to the reaction mechanisms.
