ABSTRACT
It is important to recognize that the most critical stage of LCVD is the very early stage in which the depositing material interacts with the substrate and the critical interface is created. In the later stage, the luminous gas phase interacts with the deposited LCVD material. The critical initial stage is influenced by the sorbed monomer regardless of whether LCVD is carried out in a closed or a batch-operated flow system. This implies that the truly dependable LCVD operation could be obtained only by means of a continuous in-line operation, in which a steady state of a luminous gas phase is established and well-preconditioned substrates move into the luminous gas phase and out by a linear motion.
