ABSTRACT

From Figure 13.4 it can be seen that, with the increase of anode spacing from 60mm to 160mm, the deposition rate on cathode (substrate) showed an increasing trend. The deposition on the cathode (substrate) surface seemed to reach the maximum when the anodes were removed from the plasma system, i.e., no anode assembly was present and the grounded reactor wall functioned as anode. In contrast, it is noted that, from Figure 13.5, the deposition on the anode surface decreased with the increase of anode spacing. These results clearly indicated that the too-close anode spacing not only reduced the preferred plasma polymer deposition on substrate (cathode) but also induced more undesired deposition on the anode surface. In other words, DC cathodic polymerization without anode assembly seems to be a more efficient and realistic approach in its practical applications.