ABSTRACT
Considering all advantageous features described above, an appropriate use of magnetron discharge seems to play the key role in plasma polymerization aimed at the interface engineering of dielectric materials. Dealing with electrically conducting materials, DC cathodic polymerization seems to be the best method as described in Chapter 13. In DC discharge, magnetron can be used in a different manner for different purpose, which is discussed in Chapter 15. The profile of electron temperature and electron density under the influence of magnetic field are collectively described for cathodic and anodic use of magnetrons in DC discharge.
