ABSTRACT
As described in Chapter 15, an anode magnetron (against a plain cathode) creates a funnel-shaped negative glow, and electrons near the surface of the anode are focused on the center part. In such an arrangement, Ar is fed into the reactor. In the cascade arc torch described in Chapter 16, the luminous gas created in the cascade arc generator is blown into the reaction chamber, in which electrons and ions do not have the major role; i.e., low-pressure cascade arc torch (LPCAT) creates a jet stream of excited Ar neutrals. If one feeds Ar only from a small hole created in the center of an anode magnetron, it might be possible to focus the negative glow in DC discharge and the ion bombardment on the cathode while maintaining the overall electric power input relatively low.
