ABSTRACT
The glow region of a glow discharge, at least a part of it, could be considered as the nonequilibrium plasma state, but the nonglow region is not in the plasma state by any definition. The nonglow region of a reactor could contain many chemical species created in the glow region depending on the type of gas employed, which could be used to chemically modify the surface placed in the nonglow region of a reactor. In attempts to use chemical species created in the primary plasma (direct exposure to the luminous gas phase) without exposing the substrate to the primary plasma, a mode of surface modification process described by terms such as remote plasma, secondary plasma, and so forth is used.
