ABSTRACT
In radio frequency argon plasma, however, besides excited argon neutrals, there exist many other energetic species, such as ions and high-energy electrons, that are more energetic than excited neutrals. It is usually considered that these ions and high-energy electrons can induce damage on polymer surfaces through the incision in polymer chains and etching of surface molecules. Surface morphology study by SEM also showed that a radio frequency power input as low as 0.12GJ/kg could induce a certain surface changes on plasma-treated PTFE films. The composition difference in reactive species between LPCAT argon plasma and radio frequency argon might be the direct reason for the over treatment effect that was not found in LPCAT treatment of PTFE but was observed in radio frequency argon plasma treatment of PTFE film.
