ABSTRACT
The effect of reactor size on the deposition characteristics was investigated by comparing deposition rate profiles of plasma polymerized perfluoropropene films in three reactors of different size. The local deposition rates were measured at various operating conditions (combinations of three monomer pressures and three discharge powers), which are listed in Table 19.1. Deposition rate profiles along the reactor tube in three reactors are shown in Figures 19.2, 19.3, and 19.4 for the corresponding
operating conditions indicated. Some deposition rate profiles are missing in the figures since plasma could not be sustained at certain conditions, especially in a small reactor. It is shown that most deposition occurs between two electrodes. The maximal peak of the local deposition rate coincides with the location where the strongest glow was observed.
