ABSTRACT
Therefore, the LCVD domain changes from the monomer-deficient to the energy-deficient domain as the reactor size decreases at the same operating conditions (based on external operating parameters) employed. The fact that the glow discharge could not be sustained under certain conditions, especially in a small reactor at lowW/FM values, is also due to the same effect, i.e., the energy dissipation to the reactor wall is too large to sustain a glow discharge. Even when the glow could be sustained at high W/FM values in a small reactor, the glow was always confined around the electrodes.
