ABSTRACT

Since the energy density would be different according to the relative distance from the electrodes, the different domains of plasma polymerization could exist along the

reactor axis under fixed operating conditions. Although the absolute determination of the domain along the reactor axis is difficult, the local deposition rates at same position as a function of W/FM reveal the changing domains. The following rough assignment of the domains could be made:

1. L-C (large reactor, center position): monomer-deficient domain for all operating conditions,

2. M-C (medium reactor, center position): transitional domain for lowW/FM, and monomer-deficient domain for medium to high W/FM conditions,

3. L-D (large reactor, 15 cm downstream position): energy-deficient domain for low W/FM, transitional domain for medium W/FM, and monomer-deficient domain for high W/FM conditions,

4. M-D (medium reactor, 15 cm downstream position): energy-deficient domain for low W/FM, and transitional domain for medium to high W/FM conditions,

5. L-U (large reactor, 15 cm upstream position): energy-deficient domain for low to medium W/FM, and transitional domain for high W/FM conditions,

6. M-U (medium reactor 15 cm upstream position): energy-deficient domain for low to medium W/FM, and transitional domain for high W/FM conditions.