ABSTRACT
Inertial sensors are designed to convert, or transduce, a physical phenomenon into a measurable signal. This physical phenomenon is an inertial force. Often this force is transduced into a linearly scaled voltage output with a specified sensitivity. The methodologies utilized for macroscopic inertial sensors can and have been utilized for micromachined sensors in many applications. It is worth considering what factors have led to the introduction of micromachined inertial sensors. As will be demonstrated in this chapter, differences in linear and angular sensor application requirements impact the choice of micromachining technology, transducer design, and system architecture. The system requirements often delineate micromachining technology options very clearly, although most sensing mechanisms and micromachining technologies have been applied to inertial sensors. First, the chapter will address design parameters for linear inertial sensors, or accelerometers. Technologies applied to accelerometers will demonstrate the major
physical mechanisms implemented in sensing inertial displacement. Next, design parameters specific to rotational inertial rate sensors, also called angular rate sensors or gyroscopes, will be presented. An overview of several recognized microsystem fabrication processes is also given with discussion of how technology can influence system and sensor, or transducer, design.
