ABSTRACT
There has been a tremendous growth in activity over the past seven years in exploring the use of micromachining for the fabrication of novel microstructures, microsensors, and microdevices and also their integration with electronic circuits. Specific application areas have developed to such an extent
that there are specialist meetings on the following topics: sensors and actuators,
microelectromechanical system (MEMS),
microchemical analysis systems (
µ
TAS),
optical-MEMS,
MEMS-electronics,
chemical sensors,
and microstructures and microfabricated systems.
