ABSTRACT
Traditional actuation approaches for nanopositioning include leadscrews (Physik Instrumente 2008), inchworm (Zhang and Zhu 1997, Suleman et al. 2001, Kim et al. 2002, Yeh et al. 2002,
Mrad et al. 2003, Doherty and Ghasemi-Nejhad 2005, Kim et al. 2005), voice coil actuators (Wang et al. 2008), piezoelectric transducers (Hemsel and Wallaschek 2000, Borodin et al. 2004, Spanner 2006, Mori et al. 2007, Physik Instrumente 2008), magnetic bearing mechanisms (Micromega Dynamics 2008), and °exure reduction mechanisms (Culpepper and Anderson 2004).
