ABSTRACT
Nanometer-scale mechanical devices are undergoing extensive development, both for advancing pure and applied research as well as for potential industrial and commercial applications. Typically such devices are actuated and sensed using electronic methods, and as such are termed nanoelectromechanical system (NEMS) resonators. Potential applications include high-Q electromechanical šlters and clocks, surface force probes for atomic force microscopy, mass sensing, local charge, and magnetic sensing, as well as high-speed switches, among other possibilities. ™ere is also an exciting e£ort among physicists, who are developing nanomechanical resonators for studies and applications in quantum mechanics.
