ABSTRACT
Because of a growing need for a high level of automation, flexibility, and system utilization in semiconductor fabrication, there has been a trend toward the integration of process modules into a single equipment and the integration of several pieces of equipment into a more complex integrated system. Cluster tools and photolithography equipment (track system) are typical examples of integrated equipment used in semiconductor fabrication. Due to the high-throughput requirement and high-level concurrency in performing activities, one needs an effective methodology for their analysis and control. This chapter discusses some methods for their analysis, deadlock control, and scheduling by using a resource-oriented Petri net (ROPN).
