ABSTRACT
As improvements in fabrication technology for MEMS (microelectromechanical systems) increase the avail ability and diversity of these micromachines, engineers are defining a growing number of tasks to which they can be put. The idea of carrying out tasks using large coordinated systems of MEMS units motivates the de velopment of automated, algorithmic methods for de signing and controlling these groups of devices. We re port here on progress towards algorithmic MEMS, tak ing on the challenge of design, control, and program ming of massively-parallel arrays of microactuators.
