ABSTRACT
Most of our work to date using HAADF tomography has concentrated on qualitative structural characterisation. In this paper we start to consider how best to reveal quantitative compositional information contained within the reconstructed 3D object, in particular the germanium variation in a Si/Ge quantum dot. To do this, we need to determine how the reconstruction intensity is affected by both elastic and inelastic (phonon) scattering, how dynamical effects disturb the intensity distribution of the reconstruction and lastly how the probe shape varies through the volume of the object - initial experiments have indicated how the central maximum of the probe shape remains remarkably constant over a large depth of focus [I].
