ABSTRACT
Shifting the electron probe position across the specimen induces shifts in the image. Crosscorrelation techniques are applied to obtain a map of those displacements and the values of the aberration coefficients can subsequently be deduced.
Shifting the electron probe position across the specimen induces shifts in the image. Crosscorrelation techniques are applied to obtain a map of those displacements and the values of the aberration coefficients can subsequently be deduced.