ABSTRACT
Equation (1) describes the image intensity as the incoherent summation of the coherent image intensities at incident angle q and focus level f weighted by the spatial and temporal intensity distributions S(q), F(f), respectively. The individual coherent image intensities are given as the modulus square of the convolution of the specimen exit wave function vr(k,q) at an incident angle q and the objective lens aberration function x(k,D+J,q) with corresponding beam tilt q and focus D+f Computation of (1) therefore involves a separate dynamical exit wave function calculation for each q.
