ABSTRACT
Tae Jung Kim, Tae Ho Ghong, Yong Woo Jung, and Young Dong Kim Department of Physics and Center for Information Display Research, Kyung Hee University, Seoul, 130-701, Korea
Kyung Ho Kim and Jin Jang Advanced Display Research Center, Kyung Hee University, Seoul, 130701, Korea
Abstract. We present optical properties of polycrystalline Si, and TFT device by Imaging Spectroscopic Ellipsometry (ISE). ISE has spatial resolution ability, so we can observe the structure of device whose contrast depends on the dielectric function value of the area of interest. We could observe the difference between polycrystalline Si and amorphous Si clearly and also structure of TFT device.
