ABSTRACT
The crystalline quality of these samples was measured by X-ray rocking curve (XRC). The symmetric plane XRC is related to screw dislocations, and asymmetric plane XRC is related to edge type dislocations. Before annealing the FWHM of (0002), (0004), (0006), (10-11) ZnO peaks were 56.9, 36.7, 29.9, 171.7 [arcsec], respectively. The FWHM of low incident angle peak is wider than high incident angle peak, indicating that the surface has a damage layer caused by mechanical polishing. After annealing, the crystalline quality recovered dramatically. Most of the crystalline quality changes occurred within the first lhour of annealing. The FWHM of (10-11) ZnO peak became 43.2 arcsec. After annealing lhour, the rate of change is decrease. The minimum FWHM of (0002), (0004), (0006), (10-11) ZnO peaks were obtained after annealing for 3hours, 12.6, 12.24, 12.96, 16.56 [arcsec], respectively. For annealing longer than 3hours, we find that the crystalline quality was deteriorated.
