ABSTRACT
Pyrolithic processes are based on a rapid therm al cycle, heating, melting, and (partly) evaporation of the heated vol ume. In the case of photolithic processes the photon energy is sufficient for direct breaking of the chemical bonds in a wide variety of m aterials. It is applied mostly on polymers by use
of ultraviolet lasers in wavelengths of 157 to 351 nm. Because the photon energy is converted directly in breaking chemical bonds there is almost no therm al interaction with the product itself. The reaction products escape as gas or small particles.
