ABSTRACT

PROCESSING-STRUCTURE RELATIONS FOR FERROELECTRIC THIN FILMS DEPOSITED BY ION BEAM SPUTTER DEPOSITION

ANGUS KINGON, MICHAEL AMEEN, ORLANDO AUCIELLO1, KENNETH GIFFORD, HUSAM AL-SHAREEF, THOMAS GRAETTINGER, SHANG-HSIEN ROU and PHILIP HREN North Carolina State University, Department of Materials Science and Engineering, Raleigh, North Carolina, 27695 U. S. A.