ABSTRACT

One of the associated problems is the choice of an appropriate electrode material for the capacitor. An obvious requirement for the electrode material is high elec­ trical conductivity. Also, the electrode must be compatible with the existing VLSI technology. One of the most commonly used electrode material for PZT ferro­ electric capacitors is platinum. However, platinum is not compatible with the ex­ isting VLSI technology because of the difficulty involved in etching the material. The choice of the electrode is also restricted by the interaction between the fer­ roelectric and the electrode materials at the processing temperatures involved which might result in degradation in properties of the electrode and the ferroelectric.