ABSTRACT
One of the associated problems is the choice of an appropriate electrode material for the capacitor. An obvious requirement for the electrode material is high elec trical conductivity. Also, the electrode must be compatible with the existing VLSI technology. One of the most commonly used electrode material for PZT ferro electric capacitors is platinum. However, platinum is not compatible with the ex isting VLSI technology because of the difficulty involved in etching the material. The choice of the electrode is also restricted by the interaction between the fer roelectric and the electrode materials at the processing temperatures involved which might result in degradation in properties of the electrode and the ferroelectric.